µPhase^® Sensor

Most Flexible Interferometer Sensors

These highly integrated phase-shifting Twyman-Green interferometer sensors meet the toughest demands for modern quality management. In combination with the measuring and analysis software μShape™ this high-performance precision measuring instrument provides information about the specimen's surface, wavefront or test objective
aberration.

Advantages of μPhase^® Sensors

Ideal solution for cost-effective measuring tasks with standard resolution requirements. Suitable for production areas and optical workshops, as well as for repetitive measurements and series production testing. Combined with the measuring and analysis software µShape™, this instrument offers a particularly attractive cost-benefit ratio.

• Compact size, modularity and arbitrary working orientation enable adaptation to different production and working environments
• Wide field of view alignment mode: Simple and fast alignment of the sample due to a second camera for alignment purposes
• High resolution cameras:
  μPhase^® 500 (500x500 pixels),
  μPhase^® 1000 (1000x1000 pixels)
• Measurement accuracy traceable to international standards
• High flexibility: convertable from Twyman-Green to Fizeau modus (on request)
• Standard measuring wavelength 632.8 nm; customized versions measuring at wavelengths from 355 nm to 1064 nm are also available upon request
• Simple and fast adaption to different reflectivities for optimal image contrast adjustment (μPhase^® 1000)
• Object-plane focusing ability (μPhase^® 1000 only)
• Robust, dust-proof housing