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µPhase® 3

µPhase® & µShape

µShape 8

µPhase® Objective

µPhase® OptoFlat

µPhase® Multicolor


µPhase® PLANO UP / µPhase® SPHERO UP

Phase® ST / µPhase® ST+R




Automated Measurement of Contact Lens Molds and Tools


Interferometer for measurements of the surface and wavefront deformation

μPhase® interferometers permit fast, high-precision measurements of the surface and wavefront deformation of reflective and transmitting components made from glass, plastics, metal, ceramics or similar materials. The objective and reliable results fulfill the highest quality management requirements. The non-contact measurement process helps prevent damage to the sample.

Download area

The download area contains all downloads related to the µShape software. For example flyers, the µShape demo software, descriptions of the different µShape features and add-on modules as well as installation- and configuration manuals and the current support releases. Furthermore you’ll find a comprehensive knowledge base with application reports around the µShape software and the µPhase® compact interferometers. Please use your µShape dongle number to register.

Remote support
Our support team uses TeamViewer QuickSupport to remotely support you if you have problems with your interferometer. You can download the tool here: TRIOPTICS Berlin QuickSupport

Login download area

Product Overview

μPhase® interferometers are very compact, small and lightweight digital devices that can be used in almost any work environment. With support from the μShape software, extensive measurement analyses can be performed.

The μPhase® sensor is the basis for interferometry measurements at TRIOPTICS. The sensor is modular and can be configured with various measurement diameters and stands for specific measurement tasks. In addition, customized solutions can be offered at low cost.

µPhase® 3.1/3.2/3.3.

Highly flexible

µPhase® 3.1/3.2/3.3

The Twyman Green interferometer sensor µPhase® is available in identical designs for different resolutions and can be integrated into your setup.

  • Focusing and adjustment of surface reflectivity is possible (µPhase® 3.3 only)
  • Integration in manufacturing machines and production lines is possible

µPhase® VERTICAL 3



Highly flexible and fully equipped interferometer system for manufacturing, workshops and laboratories

  • Motorized vertical Z-axis

  • Unique design for all types of reflection and transmission measurements

  • Integrated automatic radius measurement

  • Compact design with vertical measurement structure for small spaces

  • Optimal sample alignment due to integrated tilt and X-Y translation table

  • Modular design for optimization based on measurement requirements

  • Optional: Use of a tray holder and a motorized X-Y carriage for the automatic surface and radius measurement of many samples in one pass




With its tray, the µPhase® VERTICAL PRO can automatically measure 20 to 30 samples.

  • Measurement of spherical, torical and aspherical lenses as well as samples made out of glass, plastik or metal

  • Highest accuracy for sample radii up to 50 mm

  • Freely configurable and quickly exchangeable sample holder


Compact structure


µPhase® PLANO DOWN with its compact design is suitable for the measurement of flat components in research and development as well as in production

  • Measurement range for diameters of up to 150 mm

  • Samples are placed on the granite plate and measured from the top

  • Vibration insulation is usually not required since the unit has a solid granite base

  • Compact design and small footprint

  • Easy handling due to height-adjustable columns

  • Can also be used by untrained personnel due to its intuitive and easy handling

µPhase® PLANO UP

Plan lenses in production

Plan lenses in productio

For a cost-efficient quality control of optical flat surfaces in production µPhase® PLANO UP is the perfect choice.

  • Measurement range for diameters of up to 100 mm

  • Compact design for small spaces, can be placed right next to the production machine

  • Samples are positioned at the top of the unit on a ring chuck or three-point support and measured from below

  • Vibration resistant

  • No intermediate realignment is required for serial measurements

  • Can also be used by untrained personnel due to its intuitive and easy handling


Spheres in production

Spheres in Produktion

Spherical surfaces can be controlled fast and cost-effectively in production with the µPhase® SPHERO UP.

  • Measurement range for diameters of up to 50 mm

  • Compact design for small spaces, can be placed right next to the production machine

  • Samples are positioned at the top of the unit on a ring chuck or three-point support and measured from below

  • Vibration resistant

  • No intermediate realignment is required for serial measurements

  • Can also be used by untrained personnel due to its intuitive and easy handling

µPhase® ST/ST+R

Flexible and cost-efficient


µPhase® ST/ST+R can be used flexibly and cost-effectively in research and development as well as in production.

  • Measurement of flat and spherical samples

  • Compact table top stand for vertical measurements with small footprint

  • Optimal sample alignment with integrated tip/tilt and xy translation stage

  • Vertical axis with rough and fine regulation for high-precision adjustment

  • Optional: digital measurement unit for radius


Highest variability


Due to its multi-purpose structure and modular design µPhase® UNIVERSAL offers highest variability in research and development

  • 2, 4 or 6-inch measurement system for the testing of flat and spherical surfaces

  • Horizontal structure for the measurement of long radii

  • Compatible with other conventional 4-inch lenses

  • Optional CGH bracket for the measurement of aspheres, cylinders or toric surfaces

  • MTF and homogeneity measurements on request

µPhase® Customized Solutions

Application specific development

μPhase® Customized Solutions

Its modular structure and compact design make the µPhase® a highly versatile interferometer – even beyond usual measurement requirements.

  • Customized solutions for special applications can be implemented based on standard components

  • Development of additional customized components and software modules

For applications that go beyond the usual measurement requirements, TRIOPTICS offers comprehensive support for the development of application-specific systems. Its modular structure and compact design make the μPhase® a highly versatile interferometer. This means that customized solutions for special applications can be implemented based on standard components. We select the required components and have our application and software engineers develop additional customized components and software modules if necessary.

TRIOPTICS Applications µPhase®


µPhase® interferometers enable the following measurements and applications:

  • Measurement of flat, spherical, cylindrical, toric and aspherical surfaces in reflection
  • Measurement of the absolute radius of spherical, toric and aspherical lenses
  • Testing of adaptive mirrors
  • Measurement of wavefront deformation of transparent samples
  • Measurement of contact lenses and forming tools
  • Quick offline or online measurement of the tool offset of ultra-precision diamond lathes after tool changes
  • Testing of numerous high-precision, non-optical components
  • Automotive applications
  • Medical applications
Messung der Wellenfrontdeformation von transparenten Prüflingen
Schnelle Offline oder Online Messung des Tool-Offsets von ultra-präzisen Diamant-Drehmaschinen
Prüfung zahlreicher hochpräziser nicht-optischer Komponenten



Interferometer Software

With the freely configurable µShape software in the current version 8, µPhase® is ideally equipped for use in both production as well as research and development. The software controls the measurement, provides comprehensive options for analysis and offers full documentation. Measurement templates provide maximum transparency about the measurement process and permit the quick documentation of test results.

The clearly structured, menu-based user interface of µShape always complies with the comprehensive use of µPhase® and can be expanded in many different ways via the available modules. These modules can be added at any time, even after purchasing the µPhase® system.

The µShape software was developed primarily for µPhase® operation but can also be used for operating laboratory and workshop interferometers from other manufacturers. The development of customized functions is possible.

  • Various access levels allow user-specific access options, from the administrator to the production user
  • Comprehensive, context-specific direct help
  • Easy to use and less training needed for users due to easily configurable templates for any type of measurement task and analysis
  • Comfortable reanalysis option of saved measurements without re-measuring
  • Easy storage of graphics in various graphics formats (bmp, jpg, etc.)
  • Fast data export of single parameters or selected data fields as text files, binary files or other commonly used file formats (e.g. QED, Zygo XYZ, DigitalSurf, INT) for external processing
  • MetroPro compatible file format extended with sample parameters from the task description
  • An additional 2-dimensional polynomial fit
  • The measurement report provides a comprehensive presentation of results and can be configured in a variety of ways, including customer logos
  • Clearly structured presentation of the program modes by separate visualization of calibration and measurement processes
  • Comprehensive presentation of measurement parameters as measured values, in graphic 2D or 3D or freely selectable sectional graphics (1D) including integrated live camera images
  • Fast measurement of repetitive parts by storing all parameters and settings including the window size and position, with sample files in a µShape™ program file
  • Flexible and custom screen display that adapts to any monitor size
  • Live image: display on 2nd screen as an additional window
  • Always the latest technology through continuous development and regular updates – on request or as a software flat rate
  • Fully compatible with Windows 10 (64-bit and 32-bit systems)

“Aspheres”: Aspheric analysis in spherical or CGH setups

  • The asphere module permits the analysis of strong aspheres in an aspherical setup with the help of a computer-generated hologram (CGH) as well as the analysis of weak aspheres in spherical setups. A description of the asphere can be entered and saved. Various formats (rotationally symmetric) are supported. Remaining adjustment errors as well as systematic setup errors are compensated by an aspherical adjustment fit.

“Cylinder”: Cylinder analysis

  • The cylinder module analyzes cylindrical samples in a cylindrical setup (with CGH). Remaining adjustment errors are compensated by a cylindrical adjustment fit.

“Extern Interface“: External communication interface

  • The external interface module allows communication between µShape™ and external software such as LabVIEW™ for controlling the interferometer through external programs, e.g. within an automated system

“FastFringe“: Static fringe analysis

  • This module enables the analysis of a single interferogram for measurements in instable environments or with interferometers without phase shifting device.

“Fiber connector“: Fiber optic connector analysis

  • The fiber connector module allows the analysis of the end faces of fiber optic connections type PC (physical contact) as per the international IEC convention. The main parameters are gathered with just one measurement; this includes an optional display of a pass/fail analysis.

“Homogeneity“: Measurement of the homogeneity of transparent samples

  • Both aspects influencing the optical path through the sample, i.e. homogeneity (variation of the refractive index) on the one hand, and thickness variation on the other hand, can be determined in a separate program mode.

“Math Mode”: Mathematic mode

  • This program mode permits the analysis of various data assignments in combination with mathematical calculations to an additional assignment of results. Matrix calculations are not possible.

“Multiple apertures“: Multiple aperture analysis in one step

  • This module permits the joint measurement and analysis of individual unconnected apertures within a field of view, e.g. for the measurement of components mounted on polishing heads.
    The possibility of simultaneous measurement of non-connected apertures also enables a wedge analysis. This analysis can be used to determine the wedge angle of flat mirrors as well as the optical wedge of flat transfer plates with an additional mirror behind the object in one step.

“Multiple statistics“: Identical statistical analysis on multiple subapertures

  • If the sample specification defines different limits for different sub-sections of the same sample, the MultiStat module allows identical analysis for all subareas within a single measurement. The results for each section are issued separately.

“MTF/PSF“: MTF analysis

  • In the field of optics, MTF is used to describe the quality of optical systems. The module permits to calculate the MTF of focal and afocal optical components and systems

“Prisms“: Prism analysis

  • Angular errors on 90° and triple prisms can be measured interferometrically by analyzing the interference patterns observed through error deviation on 90° or 0° target angles.

“Roughness / PSD”: Analysis of roughness and PSD

  • This module allows to calculate the power spectral density (PSD) as well as roughness parameters along a freely definable straight line.

“Sample Normal Data“: Consideration of known sample deviations

  • The use of sample data (Sample Normal Data – SND) allows the identification of additional sample errors and include them in testing, e.g. deviations due to the optical design (design-based nominal values).

Technical Data

UtilizationProductionProductionProductionR&D, ProductionR&D, ProductionProductionR&D
Sample typeFlatFlatSphericalFlat
Sample size (measurement range)Different versions
up to max. Ø 150 mm
Different versions
up to max. Ø 150 mm
Sample size depending on measurement objectiveMax. Ø50 mm
Sample size depending on version and test lens
Max. Ø 100 mm
Sample size depending on measurement objective
Max. Ø 50 mmMax. Ø 150 mm
Sample size depending on version and test lens
Max. sample weight5 kg1.5 kg
(depending onconfiguration)
1.5 kg
(depending on configuration)
1.5 kg1.5 kg1,5 kg1.5 kg
Alignment toolsManual tiltManual tiltManual XY adjustment, tilt table and z-focusing (a few mm)Manual XY adjustment,
tilt table and Z-focusing
Manual tilt table
Manual XY table
Motorized, computer-controlled Z-axis
Motorized, computer-controlled X/Y/Z-axisManual tilt table
Manual XY table
Manual Z-axis
Test range radii measurementNot availableNot availableTypically 10 mm ... 200 mm
Relative radius measurement compared to a radius normal, range depends on test objective and holder
Approx. 220 mm
Absolute radius measurement with gauge (analog or digital)
300 to 500 mm depending on test optics
Integrated, automated absolute radius measurement
approx. 250 mm
Integrated, automated absolute radius measurement
Up to 2 m, depending on test objective and length of the radii measuring rail
Integrated absolute radius measurement
especially for long radii
Accuracy radius measurement--Depends on the accuracy of the radius normalDepends on gauge:
0,5-5 µm
5 µm overall
2 µm in 10 mm
With additional gauge up to 0.1 µm
Depends on gauge:
0,1-5 µm
30 µm
(h x w x d)
S: 300 x 300 mm² (free working distance 180x180 mm)
L: 440x440 mm (free working distance 330x330 mm)
Free working height : 110 / 155 / 200 mm
500 x 200 x 200 mm³500 x 200 x 200 mm³500 x 300 x 400 mm³
moving range between 160-300 mm (depends on configuration)
780 x 350 x 422 mm³830 x 400 x 500 mm³500 x 2500 x 400 mm³ (width depends on length of the rail)
WeightS: 25 kg L: 45 kg5-20 kg (depends on configuration)5-20 kg (depends on configuration)20 kg60 kg55 kg30 kg (depends on configuration)
TypeTable top deviceTable top deviceTable top deviceTable top deviceTable top deviceTable top deviceTable top device
OptionsTransmission measurementVia Add-ons eg. Multiple apertures, Waver, Tool offset
transmission measurement
CGH bracket for measurements of aspheres, cylinder or toric surfaces
Via Add-ons eg. Multiple apertures, Waver, Tool offset
Transmission measurement

Technical Data µPhase® Sensor

ParameterµPhase® 3.1µPhase® 3.2µPhase® 3.3µPhase® 3.3 (FIZ)
Camera resolution608 x 608 pixels1216 x 1216 pixels1216 x 1216 pixels1216 x 1216 pixels
Reflection settingsFixed setting,
suitable for 4 % … 80 %
Fixed setting,
suitable for 4 % … 80 %
0.5 %, 1 %, 4 %, 80 %0.0 %, 1 %, 4 %, 80 %
Measurement wavelength632.8 nm
others on request
632.8 nm,
others on request
632.8 nm,
others on request
632.8 nm,
others on request
Focusing optionNoNoYesYes
(h x w x d)
121 mm x 97 mm x 57 mm121 mm x 97 mm x 57 mm121 mm x 97 mm x 57 mm121 mm x 97 mm x 57 mm
Weight1,1 kg1,1 kg1,1 kg1,1 kg
TypeTwyman-Green phase-shifting interferometerTwyman-Green phase-shifting interferometerTwyman-Green phase-shifting interferometerTwyman-Green phase-shifting interferometer
convertable to Fizeau measurement mode
PV Repeatabilityλ/400λ/400λ/400λ/400
RMS Rep eatabilityλ/1200λ/6500λ/6500λ/6500
Measurement uncertainty with PC-based evaluationλ/20
others on request
others on request
others on request
others on request

Upgrades & Accessories

  • Replacement of the µPhase® sensor from µPhase®1 to µPhase®3.3 for a camera resolution increase from 608 x 608 pixels to 1216 x 1216 pixels
  • Horizontal or vertical stands
    The basic µPhase® units and flat lenses have a bayonet connection that permits quick and easy changes between various system structures.
  • Flat and spherical calibration surfaces with various diameters
    • Uncoated
    • Mirrored
  • License for offline analysis and documentation at office workstations without direct access to µPhase® hardware

µPhase® 3.1/3.2/3.3

µPhase® 3 XL with different wavelengths

The proven and highly integrated phase-shifting interferometer µPhase® 3 XL is modified to use with various wavelengths:

  • supports blue, green and deep red light sources
    • currently 405, 532 and 1064nm, other wavelengths on request
    • standard version @ 633nm
  • reflectivity adaption and object-plane focusing ability for all wavelengths
  • same mechanical dimensions and interfaces of the sensor for all wavelength
  • µLens SPHERO 10 f/0,7
  • µLens SPHERO 10 f/1
  • µLens SPHERO 10 f/1,5
  • µLens SPHERO 10 f/3
  • µLens SPHERO 10 f/5,2
  • µLens SPHERO 50 f/0,7
  • µLens SPHERO 50 f/1
  • µLens SPHERO 50 f/1,5
  • µLens SPHERO 50 f/2,4
  • µLens SPHERO 50 f/4,1
µLens SPHERO Objective in combination with µLens SPHERO 10
µLens SPHERO Objective in in combination with µLens SPHERO 50

Partnership with InterOptics

Our exclusive partnership with InterOptics, LLC offers additional possibilities. In Germany and selected countries we market our µPhase® as well as the interferometer OptoFlat –  a specialist for plano optics.


Specialist for flat optics

The short coherence interferometer OptoFlat is specialized in the measurement of flat optics.

  • Production ready and research capable flatness interferometer with sub-nanometer precision
  • LED illumination system minimizes coherent artifacts

  • Hand-wave no-touch sensor starts measurement without keyboard inputs


Knowledge Base


Twyman-Green setup
The most flexible interferometer setup

A Twyman-Green interferometer is a modified Michelson interferometer. Here the beam splitter is separated from the reference surface. The advantage of this configuration is greater flexibility, because both interferometer arms can be modified independently of each other. So the intensity of the reference and test arm can be easily adapted to each other depending on different sample reflectivities in order to get maximum fringe contrast. This increases the range of applications enormously. Only a maximum fringe contrast enables a maximum resolution in depth. The reference surface can be a surface that is inexpensive and accurately producible regardless of the sample size. The adaption to the sample size is done by conventional beam shaping optics introduced to the test arm. Contrary to the beam shaping optics for Fizeau interferometers these optics do not require an expensive Fizeau surface as a final surface.

As a consequence of this flexibility, the interference patterns are not caused by the sample errors only but also by the aberrations of the additional optics in the individual interferometer arms. However, nowadays samples are no longer evaluated by visual inspection of the fringe pattern but by computer controlled analysis of the phase map causing the fringe pattern. During this analysis the aberrations of the additional optics can easily be taken into account. Finally, the software provides an objective digital measurement result.

More knowledge for experts

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TRIOPTICS µPhase® Knowledge Base

Twyman-Green construction

TRIOPTICS µPhase® Knowledge Base

Fizeau construction

Fizeau interferometer for wavefront and surface measurement

Fizeau setup
The most commonly used interferometer setup

The last surface of the beam shaping optics is the so called Fizeau surface. It has to have the same shape as the sample to be tested (commonly spherical or flat) and is placed concentrically into the optical path, so the individual rays intersect perpendicular to the Fizeau surface. The majority of the light passes the Fizeau surface and is reflected at the test surface. The returning light interferes with the part of the light reflected at the Fizeau surface. So the Fizeau surface acts as beam splitter as well as reference surface. So the cavity is formed by the gap between the Fizeau and the test surface containing no additional optics. That is the reason why a Fizeau interferogram commonly directly shows the deviations of the test sample from the reference surface, i.e. Fizeau surface. The quality of the Fizeau surface determines the accuracy of the Fizeau interferometer. Fizeau surfaces are commonly available with a quality of λ/10 – λ/20 PV, better on request.