The quality requirements made on lighting optics for chip production are enormous. In order to produce EUV systems, which are on the market from prices starting at 100 million USD, the following is required for the design set-up:
During set-up of these high-precision lens assemblies, the individual lens elements are aligned both to their cell and to one another with the aid of centration testing. Validation of the image quality takes place through an MTF or wave front test.
The size of the optics makes it especially difficult to change between the different measuring systems. For this reason, the integration of measuring systems in an efficient working process is extremely important.